[labnetwork] Precautions for the inspection and handling of used semiconductor manufacturing equipment ?

[Mac Hathaway]

Hello all,

John's list sounds pretty good.  Two things to add regarding HF/Calcium 
Gluconate...

The tubes of Calgonate (calcium gluconate 2.5% gel) on my desk are 25g 
each, or ~0.9 oz, which should be small enough for TSA.  Also, I'm told 
that while the "shelf life" is two years (perhaps like the "shelf life" 
of many process gases) for Calgonate, there does seem to be some actual 
data out that suggest that the useful life after opening is much 
shorter, perhaps only months, or even weeks.  Thus, repackaging might be 
problematic.

If anyone knows how to test calcium gluconate for "viability", or what 
the failure mode is (gluconate... maybe bacterial growth?), that would 
be interesting to know.  I actually asked Calgonate Co. what happens 
after two years (their claimed shelf life), and they said... "We don't 
know, we never tried it beyond two years..."  Huh.

If you are ever looking at ALD equipment, you'll want to make sure that 
the precursor cylinders have been removed.  These are usually inside the 
cabinet, and several may contain water/air reactive organo-metallic 
materials, very often including TMA (trimethyl aluminum), pyrophoric 
materials which will burst into flame if the fittings are accidentally 
loosened.

Somewhat off-topic, it was a real pleasure to meet many of you this past 
week at the UGIM meeting.  I never realized this list was such an 
integral part of our research endeavor!


Mac Hathaway
Wetbench Safety Guy
Harvard CNS



On 6/24/2014 10:10 AM, John Shott wrote:
> Stephen:
>
> First my disclaimer:  I am not a health and safety professional, but 
> have received donated equipment over the years:  some of which have 
> been carefully decontaminated ... whereas other look as if they were 
> simply removed by cutting every line to the tool.
>
> Here are a few things that I would offer:
>
> 1. I would get a better set of gloves and probably more than one 
> type.  It sounds as if you are using simple disposable or latex 
> gloves.  Certainly something at bit more robust such as Trionic gloves 
> would provide better protection against exposure for a variety of 
> acids.  Someone (I forget who) at UGIM was describing some lightweight 
> Trionic gloves that they liked ... I think that it may have been 
> either the MIT or Harvard EH&S folks who spoke during the Sunday 
> introductory session on safety.  You probably also want something like 
> nitrile gloves that are better, I think, where solvent exposure is the 
> primary hazard.
>
> 2.  I would always check were the closest safety shower or source of 
> water is.  My guess is that you are likely often in locations where 
> there is no real safety shower ... but knowing where the nearest 
> restroom, running garden hose, etc would always be high on my list. 
> It's probably worth mention that to your host as a precondition to 
> your inspection.
>
> 3.   While others may have their favorites, we like SpilFyter Chemical 
> Classifier strips that have several patches that can detect pH, 
> fluoride, oxidizer, and a few more things.  When you are less certain 
> of the chemical, the strips that can detect more things are useful.
>
> 4. I think that Calcium Gluconate typically comes in tubes that are 
> larger than you can get through TSA.  As a result, I'd pre-fill two or 
> three smaller plastic squeeze bottles so that you can get it through 
> TSA.  I would also consider pre-shipping any other supplies to your 
> destination.
>
> 5. How about a cartridge respirator and a set of cartridges for 
> solvents, particles, etc?
>
> 6. For a measure of neutralization of surfaces, having some calcium 
> carbonate crystals that could be mixed into a dilute solution is 
> probably not a bad idea.  If I am not mistaken, most professional 
> decon teams use calcium carbonate solution for anything that might 
> have been exposed to HF or fluoride-bearing solutions such as 
> implanter source boxes that have BF3 "crusty stuff" in them.
>
> 7.  Some form of good eye protection against unexpected splashes is 
> important too.  Note: while somewhat bulky, a full face respirator 
> would give you good eye protection in addition to fume protection.
>
> Those are some of the things that I would want to have with me if I 
> were about to do battle with a piece of equipment of unknown 
> provenance.  I am confident, however, that some of the others on this 
> list will have more to add.
>
> Good luck,
>
> John
>
>
>
> On 6/24/2014 1:31 AM, Stephen Howe wrote:
>> Dear Lab Network members,
>>
>> I would be interested in getting the network's suggestions regarding the
>> following topic.
>>
>> As the owner and founder of Fabsurplus.com, a broker and reseller of
>> used semiconductor manufacturing equipment, I spend around half of my
>> time inspecting a wide selection of process equipment that has been in
>> contact with a very wide range of chemicals.
>>
>> The machines inspected include CVD and PVD equipment, solvent and acid
>> wet benches, pumps, implant equipment and lithography equipment.
>>
>> The equipment is typically "decontaminated" before we get to it.
>> Sometimes, we get a decontamination certificate and MSDS sheets with the
>> tool. This is very frequently a legal obligation prior to removal of the
>> equipment from the factory.
>>
>> The precautions I adopt during inspection are:-
>>
>> 1. Check for presence of decontamination certificates and MSDS.
>> 2. Wear some kind of disposable protective gloves during the inspection.
>> 3. Remain aware of the potentially hazardous nature of any residues or
>> fluids encountered during equipment inspections.
>> 4. In the case any fluid is found, I check the pH of the fluid using
>> indicator paper.
>> In the case the indicator paper shows acid, decontamination procedures
>> are followed.
>> 5. Following inspection, gloves are removed and disposed of , and then I
>> am always careful to thoroughly wash my hands.
>>
>> I would further comment that I have discovered around a pint of
>> concentrated HF remaining in the machines I was inspecting on 2
>> occasions in the last 15 years, and other acids on one occasion.
>>
>> I am also concerned that HF may leach into the plastic of the equipment
>> we come into contact with.
>> Furthermore, we are now exposed to a new hazard from possible residual
>> gases from excimer lasers used in photolithography.
>>
>> I have noted that in the event of leaks of HF occuring during the
>> machine's use, the steel surfaces of the machines in question -
>> typically inside the gas boxes, chamber outer parts - can have a floured
>> or stained appearance.
>> I wonder if lab network members can advise on any precautions necessary
>> for the handling and decontamination of such discolored or floured
>> surfaces ?
>>
>> I often travel around the world to do equipment inspections, and end up
>> doing the inspections armed with a flashlight in a warehouse.
>> Very often the warehouses were I do the inspection have no first aid kit
>> for the treatment of HF exposure and also no kit for the detection and
>> cleanup of acid spills.
>>
>> As such I was thinking of carrying with me a small , emergency kit.
>> In that kit I was thinking of including:-
>>
>> 1. Litmus paper
>> 2. HF paper
>> 3. A tube of Calcium Gluconate Gel
>> 4. Disposable overalls
>> 5. Gloves suitable for applying the Calcium Gluconate gel to any
>> exposure sufferer.
>>
>> I need to get though airport security and customs with the minimum of
>> fuss.
>>
>> Given the extremely wide assortment of machines we at Fabsurplus.com
>> inspect, can anyone suggest items I could do with in my "emergency
>> kit" ?
>> Can anyone suggest quantities of the items I am going to be able to get
>> through airport security without having a huge hassle ?
>> Can anyone suggest any procedures or experiences which might help me get
>> a kit like this through international customs and airport security with
>> the minimum of fuss?
>>
>> Thanks very much in anticipation for your responses.
>>
>> Yours sincerely,
>>
>> Stephen Howe
>> Company Owner
>> SDI Fabsurplus Group
>>
>>   +1 830 388 1071 (Mobile)
>> +39 335 710 7756 (Italy Mobile)
>> Skype: Stephencshowe
>> email: info at fabsurplus.com
>>
>> WWW.FABSURPLUS.COM
>> Japan-Italy-Ireland-USA
>>
>> Facebook: www.facebook.com/fabsurplus
>> Twitter: http://twitter.com/fabsurplus
>> Google+: https://plus.google.com/+Fabsurplus
>>
>> Japan-Italy-Ireland-USA
>>
>>
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