[labnetwork] Experiences with tram close to cleanroom facility?

[Morrison, Richard H., Jr.]

Hi Leif,

When we built our facility in 2012 we had vibration measurements and magnetic field measurements taken in the areas where the Stepper, SEM and AFM were to be located. These were 24 hour surveys. We have a subway line located 1 block from our facility and a freight train line 50 feet from the building.  Both surveys showed when the subway was active, there was magnetic interference and significant vibration.  However,  we were located on the 3rd floor so that attenuated the magnetic field enough and the vibration was below the specification of the tool manufacturer.

There are companies that sell electrical/magnetic shield systems we use the following company for those solutions:
Ets-lingren    www.ets-lindgren.com<http://www.ets-lindgren.com>    they make an excellent system.

If you need a good float table this company makes a unit that has active feedback control for vibration damping:
RDM INDUSTRIAL PRODUCTS, INC.
1652 Watson Court
Milpitas, CA 95035-6822
Ph: (408) 945-8400 Fax: (408) 945-8433
Website: www.rdm-ind.com

Regards
Rick


Draper Laboratory
Principal  Member of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461




From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Leif Johansen
Sent: Tuesday, September 09, 2014 10:20 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Experiences with tram close to cleanroom facility?

Dear all network members,

The City of Copenhagen is currently in the process of scheduling the construction of an electrically driven tram which may run approximately 80 feet (ca. 25 meters) past our cleanroom facility. There will even be a stop right outside on the road next to us - i.e. many accelerations and decelerations which will emit rather large magnetic fields.

Naturally, we are slightly concerned about maintaining operations - especially of our e-beam writer and SEM equipment. Are any of the lab members facing similar challenges and, if so, how do you tackle them? Is noise cancellation a viable option with large transient magnetic fields?

Best regards,

Leif

Leif S. Johansen

Head of Operations

DTU Danchip



Technical University of Denmark

[http://www.dtu.dk/images/DTU_email_logo_01.gif]

Danchip

Ørsteds Plads, Byg. 347

2800  Lyngby

Direct +45 45255713
Mobile +45 25348992

lesjo at danchip.dtu.dk<mailto:lesjo at danchip.dtu.dk>

www.danchip.dtu.dk/<http://www.danchip.dtu.dk/>



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