[labnetwork] MgF2 deposition considerations

Tue Sep 23 08:17:07 EDT 2014

HI,

WE have what is called a "dirty" evaporator for MgF, In, Sn materials like that.  We just lined the inside of the chamber with foil and after completion we carefully removed the foil and sent it to waste. Safety wanted us to wear proper PPE and we had no issue. We stored the material in a dry box in a sealed container.

Hope this helps.

Rick

Draper Laboratory
Principal  Member of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mark Walters, Ph.D.
Sent: Monday, September 22, 2014 9:22 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] MgF2 deposition considerations

We have several people here who would like for our facility to offer a MgF2 deposition process (either evaporation or sputtering or both).  While MgF2 seems to be a fairly common optical coating material, I'm having difficulty finding information about potential health and cross-contamination issues with this material in deposition systems.   I've heard everything from it's a very stable material and you don't need to worry about it, to you should wear Hazmat gear anytime you change out the sources.  I'm hoping that there are people in this community that have experience with running MgF2 deposition processes in their facilities.  If so, could you share any precautions or special procedures you implement to avoid or limit possible health concerns from fluoride exposure and cross-contamination with other materials and processes run in the same systems?

Thanks,
Mark D. Walters, Ph.D.
Director, Shared Materials Instrumentation Facility (SMIF)
Duke University
Box 90271
Durham, NC 27708-0271
http://smif.lab.duke.edu<blocked::http://smif.lab.duke.edu/>
Phone: (919) 660-5486
Fax: (919) 660-5491

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