[labnetwork] new materials for our sputter tool

[Mark Walters, Ph.D.]

We once made the mistake of trying e-beam evaporating ZnS in our Lesker PVD75 system.   We found that the sulfur totally contaminated the system and pumps.  We had to totally clean out the chamber and rebuild the pumps.  I've later learned that you pretty much need a dedicated system for sulfides with a pumping package that can handle those materials.


Mark D. Walters, Ph.D.
Director, Shared Materials Instrumentation Facility (SMIF)
Duke University
Box 90271
Durham, NC 27708-0271
http://smif.lab.duke.edu
Phone: (919) 660-5486
Fax: (919) 660-5491



-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Ferraguto, Thomas
Sent: Wednesday, April 01, 2015 10:22 AM
To: 'labnetwork at mtl.mit.edu'
Subject: [labnetwork] new materials for our sputter tool

Colleagues,

I have a customer who wants to use  YF3 (Yttrium Fluoride) , Y2O3 (Yttrium Oxide), ZnS (Zinc Sulfide) , in our Lesker Sputter tool. It's a new lab line load lock tool (DC, DC-Pulse and RF)

Does anyone have a "Red Flags" for these materials? (I just don't have experience with these specifically)

Thanks
Tom


Thomas S. Ferraguto
Saab ETIC Nanofabrication Laboratory Director University of Massachusetts Lowell
1 University Avenue
Lowell MA 01854-5120
978-934-1809 land
617-755-0910 mobile
978-934-1014 fax
[cid:image001.png at 01D06C65.AFA7A280]