[labnetwork] new materials for our sputter tool

[JR Gaines]

Hello Thomas,

Our Rob Belan, who you will meet next week, provided the following comments:

"Red flags galore.  The most problematic is the ZnS - which will decompose during sputtering and will leave traces of sulfur throughout the system.  Sulfur will contaminate  most subsequent films as it only needs to get to about 80C before it vaporizes in sufficient quantities to contaminate films.  Fine particulate can be generated from a ZnS deposition as well and that is very hard to completely remove from a vacuum system.  ZnS and most sulfides should only be run in systems that are dedicated to such films.

Fluorides in general are fairly stable - I have no direct experience with YF3.

Yttrium Oxide should be OK and I have sputtered this material in the superconductor days."

Looks like you have also received some warnings from others on the ZnS.

See you next week.

J.R.




JR Gaines | Technical Director | Tel: +1 (412) 896-8402 | Cell: +1 (614) 446-2202 | Fax: +1 (412) 872-5046 | Email: jrg at lesker.com | http://www.lesker.com

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-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Ferraguto, Thomas
Sent: Wednesday, April 01, 2015 10:22 AM
To: 'labnetwork at mtl.mit.edu'
Subject: [labnetwork] new materials for our sputter tool

Colleagues,

I have a customer who wants to use  YF3 (Yttrium Fluoride) , Y2O3 (Yttrium Oxide), ZnS (Zinc Sulfide) , in our Lesker Sputter tool. It's a new lab line load lock tool (DC, DC-Pulse and RF)

Does anyone have a "Red Flags" for these materials? (I just don't have experience with these specifically)

Thanks
Tom


Thomas S. Ferraguto
Saab ETIC Nanofabrication Laboratory Director University of Massachusetts Lowell
1 University Avenue
Lowell MA 01854-5120
978-934-1809 land
617-755-0910 mobile
978-934-1014 fax
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