[labnetwork] HF vapor etch

[Aaron Hryciw]

Hi Rick,

Another good option to consider would be memsstar
<http://memsstar.com/products-services/mems/vapor-HF-hydrogen-fluoride-vapor-phase-etching/>
.

Cheers,

 – Aaron



Aaron Hryciw, PhD, PEng

Fabrication Group Manager

University of Alberta - nanoFAB

W1-060 ECERF Building

9107 - 116 Street

Edmonton, Alberta

Canada T6G 2V4 Ph: 780-940-7938
www.nanofab.ualberta.ca


On Fri, Dec 4, 2015 at 5:35 AM, Christophe Clément <
christophe.clement at polymtl.ca> wrote:

> Hi Richard
>
> Here at Polytechnique Montreal, we have an Idonus HF vapor phase etcher.
>
> Consult the tool at http://www.idonus.com/
>
> Best
>
> Christophe
>
>
>
> *Christophe Clément*
>
> *Technicien laboratoire*
>
> Laboratoire de microfabrication (LMF)
>
> Groupe des Couches Minces (GCM) *www.gcmlab.ca <http://www.gcmlab.ca>*
>
> Ecole Polytechnique de Montréal www.polymtl.ca
>
> Département de génie physique
>
> * 2900 Boulevard Edouard Monpetit
>
> Pavillon JAB
> Campus de l'Université de Montréal
> Montréal (Québec) H3T 1J4
>
>
> 8 christophe.clement at polymtl.ca
>
> ( 514 340 4711
>
> Fax : 514 340 4711 # 2417
>
>
>
>
>
> *De :* Morrison, Richard H., Jr. [mailto:rmorrison at draper.com]
> *Envoyé :* 3 décembre 2015 13:21
> *À :* labnetwork at mtl.mit.edu
> *Objet :* [labnetwork] HF vapor etch
>
>
>
> Hi Folks,
>
>
>
> I am  looking for a HF vapor release tool, I see that OAI and SPTS are the
> 2 manufactures out there, any recommendations or other suppliers?
>
>
> thanks in advance
>
>
>
> Rick
>
>
>
>
>
> Draper
>
> Principal  Member of the Technical Staff
>
> Group Leader Microfabrication Operations
>
> 555 Technology Square
>
> Cambridge Ma, 02139-3563
>
>
>
> www.draper.com
>
> rmorrison at draper.com
>
> W 617-258-3420
>
> C 508-930-3461
>
>
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