[labnetwork] Precious metal targets: how to charge for and keep track of use

[John Nicholson]

Matthieu,
     Since we only use silane for growth of silicon oxide and silicon
nitride thin films and aren't concerned about keeping an elevated growth
rate, we buy our silane mixed down to 2% in nitrogen. EH&S was much more
amenable to this approach.
     The cylinders are size 80 (~80 ft^3, 2265 ltrs) and in seven years
I've ordered 3 of them.

Regards,
John


-- 
John Nicholson
Nanofabrication Laboratories Manager
MassNanoTech Nanofabrication Facility
Conte Center for Polymer Research, Rm. B111
University of Massachusetts Amherst
120 Governor's Drive
Amherst,MA 01003-9305
Phone: 413-545-2772
Fax: 413-577-0165


On Mon, Dec 22, 2014 at 9:42 AM, Vito Logiudice <vito.logiudice at uwaterloo.ca
> wrote:

>  Dear Colleagues,
>
>  I would be curious to know your thoughts on the following questions
> regarding precious metal sputter targets:
>
>  1. Who pays for the initial purchase of the target: end user(s) or fab
> operations?
>
>  2. If the fab owns the target how do you keep track of the amount used
> per user?
>
>  3. If the user owns the target, is it installed/removed for each run? If
> it is kept in the chamber, how do you keep non-owners of the target from
> using it?
>
>  4. Any suggestions on how to minimize errors/abuses would be appreciated.
>
>  Thank you
> Vito
>
> --
> Vito Logiudice  MASc, PEng
> Director of Operations, Quantum NanoFab
> University of Waterloo
> Lazaridis QNC 1207
> 200 University Avenue West
> Waterloo, ON           Canada N2L 3G1
> Tel.: (519) 888-4567  ext. 38703
> Email: vito.logiudice at uwaterloo.ca
> Website: https://fab.qnc.uwaterloo.ca
>
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20150107/9f08a4ed/attachment.html>