[labnetwork] Ozonized DI Water

Kamal Yadav kamal.yadav at gmail.com
Wed Jul 15 06:42:42 EDT 2015


Dear All,

Due to it being cost effective I am exploring ozonized DI water, as it can
be used in photoresist stripping applications, and can replace several
other cleaning procedures [RCA] as well to save money on high purity acid
chemicals.

If anybody has any experience regarding putting up such system, knowing
that would be helpful.

-- 
Thanks,
Kamal Yadav
Sr. Process Technologist
Electrical Engineering
IIT Bombay
Mobile: 7506144798
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