[labnetwork] Ozonized DI Water

[Kamal Yadav]

Dear Noah,

Thanks for your reply. I will wait for your feedback.

I am also looking water systems which are capable of producing ozonized DI
water with required/tunable ppm range [1 - 50 ppm].

On Wed, Jul 15, 2015 at 6:21 PM, Noah Clay <nclay at upenn.edu> wrote:

> Kamal,
>
> OEM Group has their Cintillio spray ozone tool, which appears to be a
> great RCA clean alternative.  We're hoping to evaluate this system at UPenn
> in Philadelphia - their Apps Lab is just north of the city.  I'll keep you
> posted.
>
> Best,
> Noah Clay
>
> Quattrone Nanofabrication Facility
> University of Pennsylvania
> Philadelphia, PA
>
> Sent from my iPhone
>
> > On Jul 15, 2015, at 06:42, Kamal Yadav <kamal.yadav at gmail.com> wrote:
> >
> > Dear All,
> >
> > Due to it being cost effective I am exploring ozonized DI water, as it
> can be used in photoresist stripping applications, and can replace several
> other cleaning procedures [RCA] as well to save money on high purity acid
> chemicals.
> >
> > If anybody has any experience regarding putting up such system, knowing
> that would be helpful.
> >
> > --
> > Thanks,
> > Kamal Yadav
> > Sr. Process Technologist
> > Electrical Engineering
> > IIT Bombay
> > Mobile: 7506144798
> > _______________________________________________
> > labnetwork mailing list
> > labnetwork at mtl.mit.edu
> > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>



-- 
Thanks,
Kamal Yadav
Sr. Process Technologist
Electrical Engineering
IIT Bombay
Mobile: 7506144798
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