[labnetwork] Chamber Cleaning With Gold Contamination

[Kamal Yadav]

Dear Mike and Others,

Thanks for your reply.
We also have strict policies to promote anti contamination. Policies are
structured as per SNF policies.

Mitigation experiment/procedure of any type is not possible, in this case I
suppose.

Thanks a lot!.


On Fri, Jun 5, 2015 at 6:21 PM, Mike Young <myoung6 at nd.edu> wrote:

> Hi Kamal. At risk of being misunderstood, experience in this field
> motivates me to respond with a blatant, old Americanism:
>
> -->    If it ain't broke, don't fix it!   <--
>
> Having said that, you probably already know that most groups/labs
> segregate CMOS and compound semiconductor processing equipment for this
> very reason.
>
> Best of luck,
>
> --Mike
>
>
> On Jun 5, 2015, at 5:33 AM, Kamal Yadav <kamal.yadav at gmail.com> wrote:
>
> Dear All,
>
> Though may not make much sense, but would wanted to know if there are any
> successful cleaning procedures for chamber to remove affect of gold
> usage/contamination in that chamber.
>
> We want to use the chamber with gold pads exposed to the plasma, but at
> the same time, need to allow those whose devices may get affected from gold
> [in CMOS]. Any intermediate cleaning/deposition that could significantly
> (?) reduce the affect.
>
> Our chamber [ICPCVD] has been used [5+ years] with gold pads [exposed to
> plasma] *and so far other groups have not reported any issues with their
> devices, so its working out fine till now.*
>
> But we want to take precautionary measures if any.
>
> Thanks a lot!
>
> --
> Thanks,
> Kamal Yadav
> Sr. Process Technologist
> Electrical Engineering
> IIT Bombay
> Mobile: 7506144798
>
>
> --
> Michael P. Young                                (574) 631-3268 (office)
> Nanofabrication Specialist                      (574) 631-4393 (fax)
> Department of Electrical Engineering            (765) 637-6302 (cell)
> University of Notre Dame                         mike.young at nd.edu
> B-38 Stinson-Remick Hall
> Notre Dame, IN 46556-5637
>
>
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>


-- 
Thanks,
Kamal Yadav
Sr. Process Technologist
Electrical Engineering
IIT Bombay
Mobile: 7506144798
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