[labnetwork] Ni evaporation

[Morrison, Richard H., Jr.]

Hi,

Here is info from Draper laboratory PVD engineer, Joseph Louis:

We used a FABMATE crucible from Lesker because of its surface properties:

http://www.lesker.com/newweb/evaporation_sources/ebeam_crucibles_fabmate.cfm?pgid=0

Even with its property benefits, one can really only use it for one, maybe two runs before it cracks (especially for the thick runs we were attempting).

I believe I did staggered pre-melting for this material, that is, one row of pellets, melt, second row of pellets, melt and actual run. If I recall correctly, when I tried any more than that I got voids in the melt and/or early cracking.

One process issue of note is stress especially for thicker films (e.g. 1[um]+). Lower dep rates seemed to help (~0.5[ang/sec]) but a better method is Ion Assisted Deposition if the system is capable.


Rick


Draper Laboratory
Principal  Member of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel- Sternberg
Sent: Monday, March 23, 2015 5:30 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Ni evaporation

Hi all,

We've came across some issues with Ni e-beam evaporation and thought of consulting the network:

Which crucible are you using for Ni e-beam evaporation? We've tried Al2O3 and Vitreous carbon, both recommended by the material/crucible suppliers.
Any tips with respect to melting the material or the evaporation process itself?

Thanks,

Nava


Nava Ariel-Sternberg, Ph.D.
Tel-Aviv University Center for Nanoscience and Nanotechnology, Managing Director
MNCF Manager
Phone: 03-640-5619
Mobile: 054-9984959
Email: anava at tauex.tau.ac.il<mailto:anava at tauex.tau.ac.il>

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