[labnetwork] Temperature specification for facility process chilled water

[Vito Logiudice]

Dear Colleagues,

The process chilled water loop in our cleanroom has consistently oscillated between ~15.4C and ~17.2C over a span of roughly 10 minutes. Our Plant Operations group is looking into the possibility of tightening this up for us by tuning the control sequence. They have asked for guidance on an acceptable specification.

In light of this I would appreciate hearing from you as to your facility’s PCW temperature target and tolerance. Thank you much.

Best regards,
Vito
--
Vito Logiudice  P.Eng.
Director of Operations, Quantum NanoFab
University of Waterloo
Lazaridis QNC 1207
200 University Avenue West
Waterloo, ON           Canada N2L 3G1
Tel.: (519) 888-4567  ext. 38703
Email: vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>
Website: https://fab.qnc.uwaterloo.ca

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