[labnetwork] Temperature specification for facility process chilled water

Noah Clay nclay at upenn.edu
Mon Sep 14 14:26:26 EDT 2015


Vito,

We're controlling PCW temp to 59F +/-2F.

Thanks,
Noah

Sent from my iPhone

> On Sep 11, 2015, at 15:47, Vito Logiudice <vito.logiudice at uwaterloo.ca> wrote:
> 
> Dear Colleagues,
> 
> The process chilled water loop in our cleanroom has consistently oscillated between ~15.4C and ~17.2C over a span of roughly 10 minutes. Our Plant Operations group is looking into the possibility of tightening this up for us by tuning the control sequence. They have asked for guidance on an acceptable specification. 
> 
> In light of this I would appreciate hearing from you as to your facility’s PCW temperature target and tolerance. Thank you much.
> 
> Best regards,
> Vito
> --
> Vito Logiudice  P.Eng.
> Director of Operations, Quantum NanoFab
> University of Waterloo
> Lazaridis QNC 1207
> 200 University Avenue West
> Waterloo, ON           Canada N2L 3G1
> Tel.: (519) 888-4567  ext. 38703
> Email: vito.logiudice at uwaterloo.ca
> Website: https://fab.qnc.uwaterloo.ca
> 
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