[labnetwork] Fluorescent Lamp Replacement with LED lamps in the Cleanroom?

[Donghai Zhu]

Hello Tom,

A couple of years ago, we considered to replace the fluorescent lamp by the LED lamps in clean room. Before we made decision, we got the spectrums of both the LED lamp and the GE fluorescent lamp, and compared them. There is a broad peak close to 450~460 nm besides the broad, main peak around 600 nm in the LED lamp although the intensity in 450 nm is weak. In the fluorescent lamp, the wavelengths of most of the peaks are more than 540 nm. But we still can see the weak peaks around 400~420nm. The issue may be solved If lamps are covered by filters. But we didn't do the further test.

Regards,
Donghai Zhu

Keck Photonics Lab
University of Southern California

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Ida Noddeland
Sent: Tuesday, September 22, 2015 11:49 PM
To: Noah Clay <nclay at seas.upenn.edu>; Tribble, Thomas A. <tribble at fas.harvard.edu>
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Fluorescent Lamp Replacement with LED lamps in the Cleanroom?

We do not have LED in our cleanroom, but I have heard that it is difficult to see thickness fringes in this kind of light. Another cleanroom (Electrum in Stockholm) installed LED in their EBL area, but had to reinstall some "normal" light sources after requests from the operators.

Best regards,
Ida Noddeland

Head of Laboratory
NTNU NanoLab

Sem Sælands vei 14, K1-123
7491 Trondheim
+47 41288808
www.ntnu.no/nanolab<http://www.ntnu.no/nanolab>



From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Noah Clay
Sent: Tuesday, September 22, 2015 11:52 PM
To: Tribble, Thomas A.
Cc: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Fluorescent Lamp Replacement with LED lamps in the Cleanroom?

Tom,

We use LED strip lights (3M, I believe) in our wet benches from Reynolds Tech.  As far as I know, they install LED lighting circuits in all of their new bench builds and I recommend speaking with Vince Reynolds for further information.  The lighting in our lithography benches have yellow filters on them and have posed no issues with our research community.  For the time being, the overhead cleanroom lighting at Penn is fluorescent.

Thanks,
Noah

Quattrone Nanofabrication Facility
University of Pennsylvania
Philadelphia, PA

On Sep 22, 2015, at 2:30 PM, Tribble, Thomas A. <tribble at fas.harvard.edu<mailto:tribble at fas.harvard.edu>> wrote:

The replacement of T-8 and T-5 fluorescent lamps outside the cleanroom is becoming an increasingly popular Facilities practice.  Has there been any experience with this kind of retrofit inside the cleanroom? Specifically, in Lithography and other UV sensitive areas of the cleanroom, have there been any observed (or anticipated) adverse effects from the use of LED lamps?

Thanks . . . Tom

Thomas A Tribble PE, JD | Northwest 102.32 | 52 Oxford Street | Cambridge, MA 02138 | (tel) 617 495 0990 |(cell) 617 780 5685 |

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