[labnetwork] Heating of BCl3 lines

[Nava Ariel Sternberg]

Dear all,

We have recently purchased a new Oxford Plasma Pro System100 Cobra RIE that
we intend to use with Cl chemistry (III-V etc.). Oxford recommended heating
the gas lines of BCl3. Does anyone have experience with it? We are low on
$$$ right now. How necessary that is? What is the best way to do this?

Any thought would be appreciated.

Thanks!

Nava

Nava Ariel-Sternberg, Ph.D.
Director of CNI Facilities
Columbia University
530 W120th Street, NY 10027
Room 1015/MC 8903
Office: 212-854-9927
Cell: 201-562-7600
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