[labnetwork] Suggestions for interlocking O2 plasma & HMDS systems
Vito Logiudice
vito.logiudice at uwaterloo.ca
Thu Feb 11 09:18:49 EST 2016
Hi Leif (and others),
Thank you and everyone else for taking the time to share your very varied and helpful suggestions. It’s greatly appreciated.
Best regards,
Vito
From: Leif Johansen <lej at danchip.dtu.dk<mailto:lej at danchip.dtu.dk>>
Date: Wednesday, February 10, 2016 at 6:07 AM
To: Vito Logiudice <vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>>, "labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>" <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: RE: Suggestions for interlocking O2 plasma & HMDS systems
Hello Vito,
We have plasma ashers from TePla. We have interlocked the “Enter” and “Run” buttons.
We have a YES-310TA identical to yours. We have interlocked the valve on the HMDS line. If you are interested, we can send a sketch of the solution. A few people have forgotten to log in and only discovered their mistake when their patterns fell off the wafer during development. A bit unfortunate, but a good way to teach people that they should log on to equipment.
Best regards,
Leif
Leif S. Johansen
Head of Operations
DTU Danchip
Technical University of Denmark
[http://www.dtu.dk/images/DTU_email_logo_01.gif]
Danchip
Ørsteds Plads, Byg. 347
2800 Lyngby
Direct +45 45255713
Mobile +45 25348992
lesjo at danchip.dtu.dk<mailto:lesjo at danchip.dtu.dk>
www.danchip.dtu.dk/<http://www.danchip.dtu.dk/>
From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vito Logiudice
Sent: 8. februar 2016 22:54
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Suggestions for interlocking O2 plasma & HMDS systems
Dear Colleagues,
I’d greatly appreciate hearing from those of you whom have devised ways of safely interlocking a couple of systems we’re currently working on. These include the following:
Oxygen plasma strip system: http://www.yieldengineering.com/Portals/0/YES-CV200RFS_specs.pdf
HMDS prime oven: http://www.yieldengineering.com/Portals/0/YES-310TA_specs.pdf
Thank you very much for any insights.
Best regards,
Vito
--
Vito Logiudice P.Eng.
Director of Operations, Quantum NanoFab
University of Waterloo
Lazaridis QNC 1207
200 University Avenue West
Waterloo, ON Canada N2L 3G1
Tel.: (519) 888-4567 ext. 38703
Email: vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>
Website: https://fab.qnc.uwaterloo.ca
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