[labnetwork] EVG 620 Mask Aligner issue
Shivakumar Bhaskaran
sbhas at uchicago.edu
Wed Jan 13 17:22:57 EST 2016
The lamp in the mask aligner is not reaching 500W its stays at 150W. I did send the power supply to EVG to test it in their unit and it works fine. I changed the bulbs and still the same issue. Does anyone had faced similar issue in your Mask Aligner.
-Thanks
-Shiva
Shivakumar Bhaskaran, Ph.D.
Searle CleanRoom Manager
The University of Chicago
5735 S.Ellis, Room 032
Chicago-60637
Ph:773-795-2297
https://searle-cleanroom.uchicago.edu/
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