[labnetwork] EVG 620 Mask Aligner issue

[Mario Portillo]

 blockquote, div.yahoo_quoted { margin-left: 0 !important; border-left:1px #715FFA solid !important;  padding-left:1ex !important; background-color:white !important; }  Shiva, a few suggestions ; make sure lamp is installed correctly, anode side down, anode/ cathode connections nice n tight at the light source n power supply, over cooling ??? Turn cooling off n turn lamp on, for a 500W lamp the normal operating voltage should be around average of 60vdc and 8.5 amps, last but not least .. A bad batch of lamps ??? I have seen this a few times thru the years...
I hope this helps..... Regards 


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On Wednesday, January 13, 2016, 4:52 PM, Shivakumar Bhaskaran <sbhas at uchicago.edu> wrote:


The lamp in the mask aligner is not reaching 500W its stays at 150W. I did send the power supply to EVG to test it in their unit and it works fine. I changed the bulbs and still the same issue. Does anyone had faced similar issue in your Mask Aligner.
 
  
 
-Thanks
 
-Shiva
 
  
 
Shivakumar Bhaskaran, Ph.D.
 
Searle CleanRoom Manager
 
The University of Chicago
 
5735 S.Ellis, Room 032
 
Chicago-60637
 
Ph:773-795-2297
 
https://searle-cleanroom.uchicago.edu/
 
  
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