[labnetwork] STS ASE Electrostatic Chuck

[Roy Cork]

Hi Bruce,

I need a bit more information in order to help?

Is the ESC the "older" (Blue) SEMCO type which is driven by the DR4 Electrogrip PSU? IF so then I guess you have connected an RS232 cable with some terminal software and are sending the grip command (CTRL + G) to clamp the wafer. Under normal operation (wafer load / unload) the DR4 will grip when the grip remote voltage input signal changes. On older systems this signal is output from the STS VAC module, is your system an older STS module type?

If your ESC is the "new" TDESC (Beige) type then It will use a different power supply (FUG maybe) and probably be driven by the PLC..

If you let me know the type of ESC is fitted (SEMCO or TDESC), power supply connected (FUG or DR4) and the control system type (PLC or STS modules) then we can definitely help you with the drawings and advice.

Best regards,
Roy Cork

DTU Danchip
Denmark

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Bruce Tolleson
Sent: 20. januar 2016 23:03
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] STS ASE Electrostatic Chuck

Dear Labnetwork,
Does anyone know the electrostatic chuck or have prints for the clamping circuit for an STS ASE deep RIE system?
We can manually tell the clamp to come on but it won't come on running a recipe. We suspect it may be a programming issue but we lack the info to correct it.
Can anyone help?

Bruce E. Tolleson
Rochester Institute of Technology
82  Lomb Memorial Drive, Bldg 17-2627
Rochester, NY 14623-5604
(585) 478-3836
[http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]

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