[labnetwork] RTP Purchace question

[Robert M. HAMILTON]

Adam Neal,

The University of California Marvell NanoFabrication operates five RTP
systems all manufactured by AllWin21. Specifically four AccuThermo AW610
RTP and one AccuThermo AW810 RTP. Previously the lab ran two Heatpulse
210's.

The Allwin21 tools have performed virtually trouble free. We receive
excellent support for our questions. Sourcing replacement parts such as
quartzware and lamps is reliable.

We operate the 610's in two modes, with thermocouple (TC) and with IR
pyrometry depending on the process temperature requirements. The 810 is a
MOS tool and run only in the IR pyrometer mode.

Our tools are shared by multiple users. We keep dedicated chambers for
non-MOS processes such as III-V annealing and other unusual materials. For
those users with a harsh processing and who require a thermocouple
("instrumented wafers") we have them purchase their own TC. Changing
between IR pyrometry and an instrumented wafer (TC) is relatively simple.
Low temperature process are better controlled via a TC.

Our experience in maintaining accurate IR pyrometery for an RTP requires
payng attention to the condition of the IR window of the isolation tube
(chamber). IR wavelengths pass through a thin fused silica window
fabricated into the underside of the chamber. The IR sensor, held at a
constant temperature, gets its input via this window. The window is made of
OH-free fused silica, a specific grade of silica that reduces the IR
absorption peak found in common, flame-fusion silica. Even the the window
attenuates the IR signal; its thicknes is therefore important. Each
cleaning of a chambers, even in mild HF, erodes the window reducing its
thickness. Also thin film coatings will attenuate the IR signal. Following
a chamber clean it is good practice to run a calibration. We use mild 49%
HF, 1 part to 10 parts DI to clean the IR window. A cotton swap speeds up
the process.

I have no experience with the Jipelec and cannot offer any guidance on
comparing vendors or tool performance.

Regards,
Bob Hamilton



Robert Hamilton
University of CA, Berkeley
Marvell NanoLab Equipment Manager
Rm 520 Sutardja Dai Hall, MC 1754
Berkeley, CA 94720
Phone 510-809-8618 (desk - preferred)
Mobile 510-325-7557 (my personal mobile)
E-mail preferred: bob at eecs.berkeley.edu
http://nanolab.berkeley.edu/



On Wed, Jan 20, 2016 at 3:04 PM, NEAL, ADAM T CTR USAF AFMC AFRL/RXAN <
adam.neal.2.ctr at us.af.mil> wrote:

> Labnetwork list members,
>
>
>
> The research group of which I am a part at the Air Force Research Lab is
> considering the purchase of an RTP system.  So far, we are considering the
> Jipelec Jetfirst RTP and the Allwin21 AW610 which have been recommended to
> us by some colleagues.  I've received very helpful information from Dan
> Hosler at Purdue, particularly on the Jipelec, but thought I'd solicit
> input from this mailing list as well.
>
>
>
> I'd sincerely appreciate information from list members on their experience
> using/maintaining these RTP.  If you own a system from either of these
> companies, are you satisfied and would you recommend it?  How does the
> Allwin21 RTP compare to the Heatpulse RTP on which it is based?
>
>
>
> Thanks very much for the assistance.  I've followed this list after
> attending UGIM as a student several years ago.  There's clearly a lot of
> expertise here so I'm very happy to have been introduced to this list.
>
>
>
> Adam T. Neal, PhD
> Postdoctoral Research Engineer
> Air Force Research Lab
>
> Materials and Manufacturing Directorate
>
> Universal Technology Corporation
> Wright-Patterson AFB, OH, 45433
>
> adam.neal.2.ctr at us.af.mil
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>
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