[labnetwork] ZEP-520A7 e-beam resist

Wed Jun 1 02:54:48 EDT 2016

Hi,

The company Leif mentioned for CSAR as a ZEP replacement also sell Electra a conductive coating http://www.allresist.com/ar-pc-5090-5091-electra-92/ it's not cheap but it is way cheaper than E spacer.  It also has a shelf life of over 12 months. I assume they'll ship to the US.

Best regards
Mark

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Michael Rooks
Sent: Tuesday, May 31, 2016 10:12 PM
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] ZEP-520A7 e-beam resist

For pmma and zep we simply sputter 20nm Au on top, then later remove it with KI/I gold etch (from Transene).

For HSQ on insulators we use our own mixture of PSS, a water soluble polymer, with gold on top. You can find the details here<http://nano.yale.edu/sites/default/files/files/pssa.pdf>. It's very cheap.

--------------------------------
Michael Rooks
Yale Institute of Nanoscience and Quantum Engineering
nano.yale.edu<http://nano.yale.edu>

On 05/31/2016 12:38 PM, Edmond Chow wrote:
Hi,

I have a related question about ebeam resist. I have been using AquaSAVE as anticharging layer for ebeam lithography.
However, I can't seem to find the distributor which will sell AquaSAVE in US

Do you have any information about how to get AquaSAVE from US or any replacement for AquaSAVE?

Thanks in advance.

Edmond

On Tue, May 31, 2016 at 9:01 AM, Peter J Duda III <duda at uchicago.edu<mailto:duda at uchicago.edu>> wrote:
Linda, Leif et al
FYI
GL-2000 has been discontinued recently and is no longer available through Gluon Lab.  They claim to be working on other high-performance resists, but give no specifics at this time.

Thanks
Peter J Duda
Technical Manager, Pritzker Nanofabrication Facility
Institute for Molecular Engineering
University of Chicago
5640 South Ellis Avenue
ERC LL178
Chicago, IL  60637
Office: 773-702-8903<tel:773-702-8903>
Pager/Text:  773-652-0480<tel:773-652-0480>
duda at uchicago.edu<mailto:duda at uchicago.edu>
ime.uchicago.edu<https://urldefense.proofpoint.com/v2/url?u=http-3A__ime.uchicago.edu&d=AwMFaQ&c=-dg2m7zWuuDZ0MUcV7Sdqw&r=apnDUg1OD9ejswcjrIvVgS28NpQ7-FGy7Sl7_YPlupc&m=xhKoiJKzGjZ4PAyPKU31jYluvUVbH-hwaqX_vwXIYwE&s=txauFZDRNt39sv6hSAlCenH1wfF7k-cTqV80LnAh-lg&e=>

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>] On Behalf Of Leif Johansen
Sent: Monday, May 30, 2016 3:52 AM
To: 'Linda Macks' <linda.macks at unsw.edu.au<mailto:linda.macks at unsw.edu.au>>; labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] ZEP-520A7 e-beam resist

Hello Linda,

Last time we purchased ZEP-520 was back in May 2014. We got it from Marubeni The MTL Mail Server has detected a possible fraud attempt from "urldefense.proofpoint.com" claiming to be http://www.marubeni.com/<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.marubeni.com_&d=AwMFaQ&c=-dg2m7zWuuDZ0MUcV7Sdqw&r=apnDUg1OD9ejswcjrIvVgS28NpQ7-FGy7Sl7_YPlupc&m=xhKoiJKzGjZ4PAyPKU31jYluvUVbH-hwaqX_vwXIYwE&s=EtvHsu62p-Fb3Flqssz76lbw0w8FOd4Nphxsppe_X1c&e=>
We have actually stopped using ZEP-520 due to the very high price. Instead, we have switched to AR-P C-6200 from Allresist GmbH The MTL Mail Server has detected a possible fraud attempt from "urldefense.proofpoint.com" claiming to be http://www.allresist.com/csar-62-ar-p-6200/<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.allresist.com_csar-2D62-2Dar-2Dp-2D6200_&d=AwMFaQ&c=-dg2m7zWuuDZ0MUcV7Sdqw&r=apnDUg1OD9ejswcjrIvVgS28NpQ7-FGy7Sl7_YPlupc&m=xhKoiJKzGjZ4PAyPKU31jYluvUVbH-hwaqX_vwXIYwE&s=V3R48he1i7j8wgR2Ongk8aobIDJeprgB8ZUFRRlBblE&e=>. If you are interested, we can provide you with more process details about this resist.
Another alternative would be the gL-2000 from Gluon Lab, which we purchased through Fine Material System Inc in Japan. We have tested this resist once, but we are not using it routinely in the lab.

Best regards,
Leif

Leif S. Johansen

Head of Operations

DTU Danchip

Technical University of Denmark

[http://www.dtu.dk/images/DTU_email_logo_01.gif]

Danchip

Ørsteds Plads, Byg. 347

2800  Lyngby

Direct +45 45255713<tel:%2B45%2045255713>
Mobile +45 25348992<tel:%2B45%2025348992>

lesjo at danchip.dtu.dk<mailto:lesjo at danchip.dtu.dk>

The MTL Mail Server has detected a possible fraud attempt from "urldefense.proofpoint.com" claiming to be www.danchip.dtu.dk/<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.danchip.dtu.dk_&d=AwMFaQ&c=-dg2m7zWuuDZ0MUcV7Sdqw&r=apnDUg1OD9ejswcjrIvVgS28NpQ7-FGy7Sl7_YPlupc&m=xhKoiJKzGjZ4PAyPKU31jYluvUVbH-hwaqX_vwXIYwE&s=bad6otKPG_IPaLUNRy_wPwTwiOheGoHbLQS8KTbnNz4&e=>

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Linda Macks
Sent: 28. maj 2016 02:15
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] ZEP-520A7 e-beam resist

Hello labnetworkers,

We are having trouble sourcing ZEP-520A7 e-beam resist - if anyone knows of a supplier who can deliver to Australia, I would appreciate contact details.

Many thanks,

Linda

Dr Linda Macks
Facility Manager, ANFF-NSW
Australian National Fabrication Facility

School of Electrical Engineering & Telecommunications
University of New South Wales
UNSW Sydney NSW 2052
Australia

Phone: +61 (2) 9385 7845<tel:%2B61%20%282%29%209385%207845>
Fax: +61(2) 9385 5114<tel:%2B61%282%29%209385%205114>
Email: linda.macks at unsw.edu.au<mailto:linda.macks at unsw.edu.au>

_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
The MTL Mail Server has detected a possible fraud attempt from "urldefense.proofpoint.com" claiming to be https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork<https://urldefense.proofpoint.com/v2/url?u=https-3A__www-2Dmtl.mit.edu_mailman_listinfo.cgi_labnetwork&d=AwMFaQ&c=-dg2m7zWuuDZ0MUcV7Sdqw&r=apnDUg1OD9ejswcjrIvVgS28NpQ7-FGy7Sl7_YPlupc&m=xhKoiJKzGjZ4PAyPKU31jYluvUVbH-hwaqX_vwXIYwE&s=RRU0020tPG8y8qIquWl4_iFITzIBEKKmUgXezsk4jMs&e=>

--
Edmond Chow

_______________________________________________

labnetwork mailing list

labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>

https://urldefense.proofpoint.com/v2/url?u=https-3A__www-2Dmtl.mit.edu_mailman_listinfo.cgi_labnetwork&d=AwICAg&c=-dg2m7zWuuDZ0MUcV7Sdqw&r=apnDUg1OD9ejswcjrIvVgS28NpQ7-FGy7Sl7_YPlupc&m=xhKoiJKzGjZ4PAyPKU31jYluvUVbH-hwaqX_vwXIYwE&s=RRU0020tPG8y8qIquWl4_iFITzIBEKKmUgXezsk4jMs&e=

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20160601/8474ae62/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image001.gif
Type: image/gif
Size: 1055 bytes
Desc: image001.gif
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20160601/8474ae62/attachment.gif>