[labnetwork] Pegasus - Rapier Esc question

[LaFleur, David W]

To Engineers who maintain Pegasus - Rapier Systems with Esc

Where do  you set your 15 Torr leak up rate pass/fail limit for the Esc. Does anyone have success in achieving the factory spec of 50mt/min on a 150mm chuck for 15 torr @15degC ?
What is your max flow you like to see for 15 Torr?
Thanks in advance.

David LaFleur
Equipment Engineer
Harvard University
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