[labnetwork] Cleaning of cold trap from DRIE system

[Lino Eugene, Dr]

Dear colleagues,

I would to know if someone has experience with cleaning of cold trap used in DRIE system.

I am thinking of burning the coating in an oven but I don't have the setup here. Any name of company doing that is welcome.

Thanks in advance,
_______________________________________________________________________________
Lino EUGENE, Ph.D., Jr. Eng.
Research assistant
McGill Nanotools - Microfab

Mcgill University
Rutherford Physics Building - Room 016
3600 University Street
Montreal (Quebec) Canada
H3A 2T8

Phone : 514 398 7329
Fax : 514 398 8434
E-mail : lino.eugene at mcgill.ca<mailto:lino.eugene at mcgill.ca>
Website : www.mcgill.ca/microfab/

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