[labnetwork] Cleaning of cold trap from DRIE system

[Goodman, James R]

Lino,

In my far distant past we cleaned cold traps with DI water. Most of the residues are water soluble and if you soak it long enough most everything comes out. Not knowing your process this may not be applicable to your system.

Jay.

James Goodman
Equipment Manager, Saab/ETIC Nanofabrication Laboratory
University of Massachusetts, Lowell
40 University Ave.
Room 121
Lowell, MA -01854
Office (978) 934-3469
Cell (603) 235-1496
[cid:image001.png at 01D1CBA3.00EEE8E0]

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Lino Eugene, Dr
Sent: Monday, June 20, 2016 3:51 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Cleaning of cold trap from DRIE system

Dear colleagues,

I would to know if someone has experience with cleaning of cold trap used in DRIE system.

I am thinking of burning the coating in an oven but I don't have the setup here. Any name of company doing that is welcome.

Thanks in advance,
_______________________________________________________________________________
Lino EUGENE, Ph.D., Jr. Eng.
Research assistant
McGill Nanotools - Microfab

Mcgill University
Rutherford Physics Building - Room 016
3600 University Street
Montreal (Quebec) Canada
H3A 2T8

Phone : 514 398 7329
Fax : 514 398 8434
E-mail : lino.eugene at mcgill.ca<mailto:lino.eugene at mcgill.ca>
Website : www.mcgill.ca/microfab/<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.mcgill.ca_microfab_&d=CwMFAg&c=lqHimbpwJeF7VTDNof4ddl8H-RbXeAdbMI2MFE1TXqA&r=eAMk9Z3RNXQ6ywUOsU2ajGmD47SXvUGAeNkzp7h1VC8&m=5KccaDSo66_DkEkocUByLu1sVF7NxZ40ECc4n32NjCM&s=lJr-ppKOY0c9Jjuf0mh_FrXsSoKH3UssNqaevP5zFy4&e=>

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