[labnetwork] Turbo pump failure

[Chris Malocsay]

Hi Tzu-Min; there are a lot of repair houses.  Rebuilding a turbo pump
takes special equipment and some skill so I don't recommend you trying it
alone.  Here is my 3 favorite repair houses.
PTB Sales
Sertec
Provac
I recommend sending the turbo and controller to ensure the everything is
attended to.
Chris





Chris Malocsay
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On Tue, Jun 21, 2016 at 3:25 PM, Kevin Owen <kjvowen at lnf.umich.edu> wrote:

> Which turbotronik controller do you have? If it has the set of ~10 "load"
> LEDs, usually one will be flashing which indicates the failure mode (table
> is in the turbotronik manual). Either way, we have almost all of our pump
> work done by outside vendors. For turbos, I have had good results with Trotec
> Solutions <http://www.trotecsolutions.com/>, although there are plenty of
> other repair companies. I believe Leybold actually does repairs as well,
> although I've not gone through them. On the other side of things, I have
> had bad luck with A&J Vacuum. They offer *very* competitive pricing and
> lead times, but pretty much every pump we've had repaired or bought
> refurbished has died in like a year. May just be our luck, though.
>
> -Kevin
>
> On Tue, Jun 21, 2016 at 2:09 PM, Tzu-Min Ou <Tzumin.Ou at colorado.edu>
> wrote:
>
>> Good day,
>>
>> Just wanted to thank Utah Nanofab's hospitality and all the participants'
>> selfless sharing. The UGIM in U. of Utah was a wonderful experience for
>> a first-time attendee.
>>
>> Back to reality, the turbo pump (Leybold Turbovac 361 C with mechanical
>> rotor suspension) on our RIE system was making a loud high-pitched sound,
>> and the controller showed a "failure" status. This turbo pump has been on
>> all the time for the past 2-3 years, except for few unexpected power
>> outage. I am curious if anyone had this kind of turbo pump failure before?
>> What would be the possible causes of the failure?
>>
>> In addition to that, I am seeking some professional suggestions on how to
>> fix it. Would you recommend to replace the bearing by the professionals, or
>> can this be done by myself (only watched youtube video and it looked quite
>> complicated)? I will deeply appreciate if anyone can share the names
>> of reliable inexpensive repairers and/or the vendors of the repair kit.
>>
>> Thank you,
>>
>> Tzu-Min
>>
>> --
>> Tzu-Min Ou, Ph.D.
>> Lab Manager
>> Colorado Nanofabrication Laboratory
>> Department of Electrical, Computer, and Energy Engineering
>> University of Colorado at Boulder
>>
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>>
>>
>
>
> --
> Kevin Owen
> Senior Engineer in Research
> Operations Group, Lurie Nanofabrication Facility
> University of Michigan
> (734) 545-4014
>
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>
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