[labnetwork] SRD inserts

[Bowser, Jerry (Fed)]

Hi Keith,

Here at the CNST NanoFab, we have installed a master 4 pin rotor and have inserts for 2”, 3”, 4”, 6”, and 8” wafers as well as 5” and 6” masks.  We have this installed on 3 double stack SRDs with one rotor set for each stack.  Over time, we have found that removing and replacing rotors to accommodate different substrate sizes caused quite a bit of damage to the SRD and galled the end of the rotor shafts.  Plus, we only had staff changing rotors which became time consuming.  Now, users change their own rotors and it takes about 30 seconds.  I’m a big fan!  We purchased our setup from OEM Group.  Feel free to give me a call or email if you would like to discuss.

Best Regards,
Jerry


*******************************************
Jerry Bowser
Assistant Manager for Operations
NanoFab Operations Group
Center for Nanoscale Science and Technology
National Institute of Standards and Technology
Phone: (301) 975-8187



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Keith Franklin
Sent: Saturday, April 30, 2016 5:36 PM
To: Labnetwork <labnetwork at mtl.mit.edu>
Subject: [labnetwork] SRD inserts

Good afternoon all,

Our lab currently supports 6" round, 4" round & 4" square substrates & are looking into efficient ways of easy start to finish processing.  Has anyone here used SRD rotor inserts?  Having learnt many years ago that allowing our users to freely change rotors was (ahem) unwise, we currently have multiple SRD's in each wet processing area, each configured for a different substrate geometry.  Based on usage, this is not an efficient use of space, and increases the overall cost of operation (meaning more things to maintain and repair).

We are currently entertaining the idea of having one SRD per wet processing area configured with a 6" round rotor, and purchasing "balanced inserts" that would then fit the appropriate cassette.  For reasons mentioned above, this is extremely attractive to us.  After engaging with the vendor (in this case Sitek), I was surprised to see the cost is quite significant.

I would value any input, advice or feedback any of you may be able to provide.

Kind Regards,
Keith


Keith Franklin

Operations Manager

University of Alberta - nanoFAB

W1-060 ECERF Building

9107 - 116 Street

Edmonton, Alberta

Canada T6G 2V4                      Ph: 780-492-0170
www.nanofab.ualberta.ca<http://www.nanofab.ualberta.ca>
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