[labnetwork] Perkin Elmer 2400 8" sputter Arcing

[Paolini, Steven]

Check to make sure that there are no ferrous fasteners or fixturing in the RF path. Any magnetic material will cause tuning issues and affect sensitive instrumentation as you have stated. This problem is common when a screw goes missing and is replaced with a black iron or galvanized fastener.

Steve Paolini
Equipment Dood
Harvard University Center for Nanoscale systems.

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chito Kendrick
Sent: Thursday, May 19, 2016 9:15 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Perkin Elmer 2400 8" sputter Arcing

I am looking for information on how to fix an issue I have with our Perkin Elmer sputter tool. The system was working reasonably, but now when we run the system there is alot of arcing. It is not related to the target material or if we use a different target position. At 100 W there is no arcing and once we go above that, normally we use 700 W with this system for deposition of HfOx, we observe the arcing issue. This is not a continuous arc, but very sporadic events and has been leaving visible damage to the dark shields and the chamber walls. I have cleaned the dark shields, chamber wall, and sample stage with sandpaper and wipe all the surfaces with solvents, but that did not seem to have an affect on the arcing issue.

This tool has also had a long issue with RF leakage effecting the mass flow controllers and RF tuning unit. Past lab users have tried to ground all the instruments that were effected but with minimal improvement.

Any information or help would be greatly appreciated.

Chito Kendrick
--
Chito Kendrick Ph.D.<https://urldefense.proofpoint.com/v2/url?u=https-3A__sites.google.com_site_chitokendrickphd_&d=CwMCaQ&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=21Cmj-bdePcgPaygv1HgfQEleEWP2YFt21m64ZGEOhQ&s=Ci5f7Sm0y_yaNm8KZeNFoX3U9S4KSK-UUE57JqqIWYU&e=>

Director of the Microfabrication Facility
Research Assistant Professor
Electrical and Computer Engineering
Michigan Technological University
Room 436 M&M Building
1400 Townsend Dr.
Houghton, Michigan 49931-1295

814-308-4255
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