[labnetwork] Perkin Elmer 2400 8" sputter Arcing

[Chito Kendrick]

I am looking for information on how to fix an issue I have with our 
Perkin Elmer sputter tool. The system was working reasonably, but now 
when we run the system there is alot of arcing. It is not related to the 
target material or if we use a different target position. At 100 W there 
is no arcing and once we go above that, normally we use 700 W with this 
system for deposition of HfOx, we observe the arcing issue. This is not 
a continuous arc, but very sporadic events and has been leaving visible 
damage to the dark shields and the chamber walls. I have cleaned the 
dark shields, chamber wall, and sample stage with sandpaper and wipe all 
the surfaces with solvents, but that did not seem to have an affect on 
the arcing issue.

This tool has also had a long issue with RF leakage effecting the mass 
flow controllers and RF tuning unit. Past lab users have tried to ground 
all the instruments that were effected but with minimal improvement.

Any information or help would be greatly appreciated.

Chito Kendrick

-- 
Chito Kendrick Ph.D. <https://sites.google.com/site/chitokendrickphd/>

Director of the Microfabrication Facility
Research Assistant Professor
Electrical and Computer Engineering
Michigan Technological University
Room 436 M&M Building
1400 Townsend Dr.
Houghton, Michigan 49931-1295

814-308-4255
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