[labnetwork] ZEP-520A7 e-beam resist

Tue May 31 10:01:08 EDT 2016

Linda, Leif et al
FYI
GL-2000 has been discontinued recently and is no longer available through Gluon Lab.  They claim to be working on other high-performance resists, but give no specifics at this time.

Thanks
Peter J Duda
Technical Manager, Pritzker Nanofabrication Facility
Institute for Molecular Engineering
University of Chicago
5640 South Ellis Avenue
ERC LL178
Chicago, IL  60637
Office: 773-702-8903
Pager/Text:  773-652-0480
duda at uchicago.edu
ime.uchicago.edu

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Leif Johansen
Sent: Monday, May 30, 2016 3:52 AM
To: 'Linda Macks' <linda.macks at unsw.edu.au>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] ZEP-520A7 e-beam resist

Hello Linda,

Last time we purchased ZEP-520 was back in May 2014. We got it from Marubeni http://www.marubeni.com/
We have actually stopped using ZEP-520 due to the very high price. Instead, we have switched to AR-P C-6200 from Allresist GmbH http://www.allresist.com/csar-62-ar-p-6200/. If you are interested, we can provide you with more process details about this resist.
Another alternative would be the gL-2000 from Gluon Lab, which we purchased through Fine Material System Inc in Japan. We have tested this resist once, but we are not using it routinely in the lab.

Best regards,
Leif

Leif S. Johansen

Head of Operations

DTU Danchip

Technical University of Denmark

[http://www.dtu.dk/images/DTU_email_logo_01.gif]

Danchip

Ørsteds Plads, Byg. 347

2800  Lyngby

Direct +45 45255713
Mobile +45 25348992

lesjo at danchip.dtu.dk<mailto:lesjo at danchip.dtu.dk>

www.danchip.dtu.dk/<http://www.danchip.dtu.dk/>

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Linda Macks
Sent: 28. maj 2016 02:15
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] ZEP-520A7 e-beam resist

Hello labnetworkers,

We are having trouble sourcing ZEP-520A7 e-beam resist - if anyone knows of a supplier who can deliver to Australia, I would appreciate contact details.

Many thanks,

Linda

Dr Linda Macks
Facility Manager, ANFF-NSW
Australian National Fabrication Facility

School of Electrical Engineering & Telecommunications
University of New South Wales
UNSW Sydney NSW 2052
Australia

Phone: +61 (2) 9385 7845
Fax: +61(2) 9385 5114
Email: linda.macks at unsw.edu.au<mailto:linda.macks at unsw.edu.au>

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