[labnetwork] Ebeam deposition of Gold

[Dan McCammon]

As Noah says, this is caused by improved heat sinking to the hearth.  If it makes the power requirement too high to get the dep rate you want, try  putting a small alumina spacer under the crucible.  This will greatly decrease the power requirement. 

         Best wishes,
             Dan

On Nov 12, 2016, at 8:11 AM, Noah Clay <nclay at upenn.edu> wrote:

> Chito,
> 
> With the tungsten crucible, I believe that you have more effective heat sinking to the e-beam hearth. Therefore, the process requires more current to the achieve melting or evaporation.
> 
> Noah Clay
> Director, Quattrone Nanofabrication Facility
> University of Pennsylvania 
> 
> On Nov 11, 2016, at 16:43, Chito Kendrick <cekendri at mtu.edu> wrote:
> 
>> We have a Denton electron beam deposition system for doing Cr/Au and most users want 5 nm Cr/ 100 nm Au. It has a Telemark 6kV supply.
>> We were using a carbon crucible for gold, but it it looked like we were getting carbon contamination so I switch to a tungsten crucible (7 cc). This seemed to be going well, except we are now having to increase the beam current after each run to melt the gold and to get the same rate. I have changed the filament and there was no improvement. I put in some more gold, but that seems to have made is worse. Could I have over filled the crucible so there is too much mass to melt? All the other materials we have seem to not have changed and it was only the gold we change the crucible to.
>> 
>> I am very tempted to order a new crucible or find away of getting the gold out of the W crucible to reduce the mass.
>> Chito Kendrick
>> -- 
>> Chito Kendrick Ph.D.
>> 
>> Managing Director of the Microfabrication Facility
>> Research Assistant Professor
>> Electrical and Computer Engineering
>> Michigan Technological University
>> Room 436 M&M Building
>> 1400 Townsend Dr.
>> Houghton, Michigan 49931-1295
>> 
>> 814-308-4255
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