[labnetwork] Ebeam deposition of Gold

Beth Fuchs bfuchs at unm.edu
Mon Nov 14 12:02:01 EST 2016


We used tungsten crucibles for our gold evaporation in the past but wnt 
back to glossy carbon crucibles instead. We found that we were having 
issues with the gold alloying with the tungsten crucible.
Beth

-- 
Beth Fuchs
Sr. Engineering Lab Coordinator
Center for High Tech Materials
1313 Goddard SE
Albuquerque, NM 87106-4343
bfuchs at unm.edu

On 11/11/2016 2:43 PM, Chito Kendrick wrote:
> We have a Denton electron beam deposition system for doing Cr/Au and
> most users want 5 nm Cr/ 100 nm Au. It has a Telemark 6kV supply.
>
> We were using a carbon crucible for gold, but it it looked like we were
> getting carbon contamination so I switch to a tungsten crucible (7 cc).
> This seemed to be going well, except we are now having to increase the
> beam current after each run to melt the gold and to get the same rate. I
> have changed the filament and there was no improvement. I put in some
> more gold, but that seems to have made is worse. Could I have over
> filled the crucible so there is too much mass to melt? All the other
> materials we have seem to not have changed and it was only the gold we
> change the crucible to.
>
> I am very tempted to order a new crucible or find away of getting the
> gold out of the W crucible to reduce the mass.
>
> Chito Kendrick
>
> --
> Chito Kendrick Ph.D. <https://sites.google.com/site/chitokendrickphd/>
>
> Managing Director of the Microfabrication Facility
> Research Assistant Professor
> Electrical and Computer Engineering
> Michigan Technological University
> Room 436 M&M Building
> 1400 Townsend Dr.
> Houghton, Michigan 49931-1295
>
> 814-308-4255
>
>
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