[labnetwork] ALD TEMAHf precursor and pump oil loss

[Elena Cianci]

Good day all,


We have a Cambridge Nanotech Savannah200, and few days ago we mounted 
TEMAHf cylinder.

The system is pumped by a rotary vane pump Pascal2021 with Fomblin oil. 
After few processes using TEMAHf and ozone, a large oil loss has been 
observed, with oil present in the vessel under the pump.

Furthermore, HfO2 films resulted with lower refractive index than expected.


Are there incompatibility issues of precursors like TEMAHf with the pump 
in use?

or are there other issues that we should take into account to prevent 
such problem?


We really approeciate any suggestions you might have

Elena Cianci



--------------------------------------

Elena Cianci, PhD
Research associate
CNR-IMM, Unità di Agrate Brianza
via C. Olivetti 2
20864 Agrate Brianza (MB), Italy







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