[labnetwork] Exhaust of corrosive chemical storage cabinets

[Peter J Duda III]

Jim
Santa Clara developed what is now known as the Toxic Gas Ordinance way back in 1988 as a response to the growing number of semiconductor facilities in that area.  It has since been modified and is mostly used as the model for the Universal Fire Code.  While no source is definitive and local codes vary - I have found this document:
http://www.sbaypipe.org/assets/pdf/TGO_Toxic_Brochure_single%20pages_0519.pdf
to be extremely helpful in providing general guidance regarding most standard semiconductor gases.  Not only does it cover generally where TGO varies from the model fire code - There are a lot of good definitions, the general requirements are very easy to follow and the table of gases provides easy access to classifications and IDLH, etc.   Again - one needs to cross check against your local requirements, but a 20 minute read can give you an abundance of info regarding what is required throughout much of the US.
Specifically to your question - you can see under the general requirements in the "Exhaust Ventilation System" which class of gasses are required to be "treated" to ½ IDLH.  Under the TGO Synopsis you can see under bullet
"S" what is involved in a "treatment system".  I leave it to you to interpret those for your specific application and again - to cross check those requirements against local codes.

Thanks
Peter J Duda
Technical Director, Pritzker Nanofabrication Facility
Institute for Molecular Engineering
University of Chicago
5640 South Ellis Avenue
ERC LL178
Chicago, IL  60637
Office: 773-702-8903
Pager/Text:  773-652-0480
duda at uchicago.edu
ime.uchicago.edu

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of James Marsh
Sent: Monday, November 21, 2016 10:15 AM
To: labnetwork at mtl.mit.edu
Cc: James Marsh (mail.mil) <James.e.marsh14.ctr at mail.mil>
Subject: [labnetwork] Exhaust of corrosive chemical storage cabinets

Hello,
I would like some feedback regarding the pros/cons of venting corrosive chemical storage cabinets to outdoors. I may be looking at the wrong resources, but after checking NFPA, SEMI, FM Global, both state and international fire and mechanical codes, I have found only sketchy guidance.

I would welcome either ideas or suggestions of where to look for definitive guidance.

Thanks, and have a great day.

Jim

James "Jim" Marsh, Contractor
Facility Manager/Test Coordinator
EOIR Technologies, Inc. - A Polaris Company

Supporting
US Army Night Vision and Electronic Sensors Directorate
Semiconductor Material and Fabrication Research Center
10221 Burbeck Rd.
Ft. Belvoir, VA  22060

Ph: (703) 704-1778
Mobile: (703) 498-1279



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