[labnetwork] Project Feasibility for RIE

[Abelev, Esta]

Hi,

I would like to introduce myself, I am Esta Abelev a Technical Director of Nanoscale Fabrication facility at University of Pittsburgh.
Recently, I received request to etch following materials (see below table), that I have never worked with. I wanted to ask the community if somebody have an experience with those materials and how the best way to etch it.

Need to etch the polymer electrolyte (salt concentration is 2.5 mM based on the volume of Ionic liquid. And PEGDA/IL is 60/40 wt.%) on the silicon substrate except those areas protected by metal. The chemical formulas for these materials are as follows:

Name


Chemical Formula


Polyethylene glycol dicrylate


CH2CHCO(C2H4O)nCOOCHCH2


1-butyl-3-methylimiadazolium tetrafluoroborate


C8H15BF4N2


Silver tetrafluoroborate


AgBF4


2-Hydroxy-2-methylpropiophenone


C10H12O2


Thank you, Esta

.........................................................................................................................................................................................
Dr. Esta Abelev

Technical Director of PINSE/NFCF
Petersen Institute of NanoScience and Engineering (PINSE)
Nanoscale Fabrication and Characterization Facility (NFCF<http://www.nano.pitt.edu/facilities>)
University of Pittsburgh
636 Benedum Hall
3700 O'Hara Street
Pittsburgh, PA 15261

Phone: 412-383-4096
Email: eabelev at pitt.edu<mailto:eabelev at pitt.edu>
Office: M104 Benedum Hall
http://www.nano.pitt.edu


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20161013/4780c1a7/attachment.html>