[labnetwork] Sputtering PTFE

[A. William (Bill) FLOUNDERS]

Use the C4F8 step only of your pulsed gas (Bosch Process) etcher
Bill Flounders
UC Berkeley



On Wed, Aug 9, 2017 at 4:52 PM, Fouad Karouta <fouad.karouta at anu.edu.au>
wrote:

> Hi all,
>
>
>
> We have a suer looking to sputter teflon (PTFE), I wonder if there is any
> facility in the network capable of sputtering PTFE.
>
>
>
> Thanks, Fouad
>
>
>
> *************************************
>
> Manager ANFF ACT Node
>
> Australian National Fabrication Facility
>
> Research School of Physics and Engineering
>
> L. Huxley Building (#56), Mills Road, Room 4.02
>
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>
> ACT 0200, Canberra, Australia
>
> Tel: + 61 2 6125 7174 <+61%202%206125%207174>
>
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> Email: fouad.karouta at anu.edu.au
>
> http://anff-act.anu.edu.au/
>
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>
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