[labnetwork] Dry etch test pattern for investigation of micro loading effect

[Junghoon Yeom]

Frank,

There have been a lot of literature and studies on microloading effect and
aspect ratio dependent etching (ARDE) in RIE and DRIE technology. See the
following two papers which discuss the mask design to study microloading
and ARDE effects.

Critical aspect ratio dependence in deep reactive ion etching of silicon
http://ieeexplore.ieee.org/abstract/document/1217094/

Maximum achievable aspect ratio in deep reactive ion etching of silicon due
to aspect ratio dependent transport and the microloading effect
http://avs.scitation.org/doi/abs/10.1116/1.2101678

Hope this helps.

Junghoon Yeom


On Sun, Aug 27, 2017 at 7:27 PM, Fouad Karouta <fouad.karouta at anu.edu.au>
wrote:

> Hi Frank,
>
>
>
> I am not sure what you mean by loading effect. To me, loading effect
> means: etch rate depends on sample size, sample size small etch rate higher
> as compared  to same patterns with larger sample. Maybe it is better to
> explain more in details what you’re after.
>
> Maybe you are mixing up with what is called leg effect which means higher
> etch rate with larger pattern as compared to smaller patterns.
>
> Regards, Fouad
>
>
>
> *From:* labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces@
> mtl.mit.edu] *On Behalf Of *Chen Yulong (Frank)
> *Sent:* Friday, 25 August 2017 11:07 PM
> *To:* labnetwork <labnetwork at mtl.mit.edu>
> *Subject:* [labnetwork] Dry etch test pattern for investigation of micro
> loading effect
>
>
>
> Hi
>
>
>
> I am current using an ICP RIE etch tool to fabricate silicon mold for
> microfluidic. Since the dry etch process have the micro loading effect, I
> would like to use some test pattern to find the appropriate process.
>
>
>
> Does anyone that has some recommend test pattern to investigate the micro
> loading effect?
>
>
>
> Regards,
>
>
> ------------------------------
> 陈宇龙(CHEN Yulong) PhD Student
>
> Department of Materials Science and Engineering
> SUSTech  http://www.sustc.edu.cn/en/
> Tel: +86-18589050065 <+86%20185%208905%200065>
>
>
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