[labnetwork] Two SEM/EBLs set up in the same room : comments

[Michael Rooks]

When you say "jagged edges pictures", I take that to mean that there is 
considerable vibration and/or acoustical noise in the cleanroom. It is 
foolish to throw away the SEM's resolution just so it can be inside a 
cleanroom. Both viewing resolution and e-beam writing resolution will 
suffer. I suggest you put the SEM on a firm basement or bedrock floor. I 
may get some flak for saying this, but: you don't need a cleanroom for 
e-beam writing, because you are not (presumably) printing integrated 
circuits. Low vibration should be a higher priority than convenience and 
particle counts. Around here we give the students the choice of doing 
the spinning and developing in a cleanroom, or in a non-clean fume hood.

If the manufacturer passes the site while you can see vibration in the 
old SEM, you should find a better manufacturer.

--------------------------------
Michael Rooks
Yale Institute of Nanoscience and Quantum Engineering
nano.yale.edu <http://nano.yale.edu>



On 12/19/2017 03:04 PM, Palard, Marylene wrote:
> Dear Lab Managers
> E-beam photolithography/ SEM experts,
>
> At UT Austin we are lucky to have the task of installing a new EBL/SEM in our NNCI cleanroom lab.
>
> The operation team is leaning towards having the new EBL/SEM system in the same room as the 10 years old one.
>
> Assuming that
> - both items are fitting in the room,
> - the manufacturer site survey passed,
> - we agreed with jagged edges pictures due to cleanroom flow
> Could you please share your thoughts on that plan.
>
> Sincerely
> Marylene, an avid reader of the labnetwork messages
>
> _______________________________
> Marylene Palard, Ph.D.
> Program Manager
> http://www.mrc.utexas.edu/
> (512) 965 6671
>
> The University of Texas | Microelectronics Research Center
> Bldg #160 | 10100 Burnet road | Austin, TX 78758-4445
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20171219/e20ec64b/attachment.html>