[labnetwork] Heidelberg Direct Write tool

Abelev, Esta eabelev at pitt.edu
Tue Feb 14 13:13:45 EST 2017


Good Afternoon,

Our facility is looking to purchase Direct Laser Write tool, based on the budget we are looking on two options microPG101 or MLA100.
We did not have those capabilities before therefore it is hard to access at this point of time if the main work load on the tool will be on a direct wafer write or mask making.
I would like to ask for a feedback/comments on those two systems: operation/maintenance/how user friendly/ and configuration, specially, if somebody have experience with MLA100 system.

Thank you in advance, Esta


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Esta Abelev, PhD
Technical Director, Petersen Institute of NanoScience and Engineering
University of Pittsburgh | 3700 O'Hara Street | 636| Pittsburgh, PA 15261
412-383-4096 | eabelev at pitt.edu<mailto:eabelev at pitt.edu> | nano.pitt.edu<https://na01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.nano.pitt.edu%2F&data=01%7C01%7Ceabelev%40pitt.edu%7C9f5bd58ba84940765cf308d4024fbe18%7C9ef9f489e0a04eeb87cc3a526112fd0d%7C1&sdata=3KfbG5VbshqdoIAPxvX%2F2s1UeU7ultmBoZmm%2FaZ2Itc%3D&reserved=0>


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