[labnetwork] poly silicon germanium

J Provine jprovine at stanford.edu
Wed Jan 25 10:16:34 EST 2017


hi robert,
i'm guessing SiGe is also available some other places, but it definitely is
at stanford's SNF (
https://snf.stanford.edu/SNF/equipment/chemical-vapor-deposition/low-pressure-cvd/thermcopoly2-1/characterization/ee412-final-reports)
and Berkeley's nanolab (
https://docs.google.com/document/d/1x0lDvrF1Pj04sJk7UTAs8pYEvLgN573C8lutnDwzJjI/edit
and
https://docs.google.com/document/d/1dK8MPkOfw_Rje439klHMx0WPDXfcvpI-b6KUcajLmpQ/edit
).

take care
j

On Tue, Jan 24, 2017 at 2:12 PM, Robert Vandusen <
RobertVandusen at cunet.carleton.ca> wrote:

> Hi everyone.
>
>
>
> A client has contacted me looking for polysilicon germanium deposition
> capability (with germanium less than 20%).
>
>
>
> Just wondering if there is anyone on the Labnetwork that might be able to
> help.
>
>
>
> Thanks
>
> Robert Vandusen
> Microfabrication and FANSSI Cleanlab Facility Manager
> Electronics Department
> Carleton University
> room: 4184 Mackenzie Building
> 613-520-2600 ext 5761 <(613)%20520-2600>
> rvanduse at doe.carleton.ca
>
>
>
>
>
>
>
>
>
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