[labnetwork] doped Poly Question

[Morrison, Richard H., Jr.]

Hi Everyone,

I have the need to deposit In-Situ doped P-Type Polysilicon. Do any of you run that process, is so what feed gas is commonly used?

I understand that In-Situ doped N-Type poly uses P or As mixed with Silane in the same cylinder is that correct?

Do any of you offer P-Type In-Situ doped polysilicon for 150mm wafers?


Thanks

Rick


Richard H. Morrison
Principal Member of the Technical Staff
Draper
555 Technology Square
Cambridge, MA
02139-3573

Work  617-258-3420
Cell  508-930-3461
www.draper.com<http://www.draper.com>

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