[labnetwork] Please recommend a RF sputter system

[Morrison, Richard H., Jr.]

Hi,

We have had excellent success with a KDF sputter tool, 4 targets with RF sputter module. It is modeled on the former MRC tools, industry work horse.

Rick


Richard H. Morrison
Principal Member of the Technical Staff
Draper
555 Technology Square
Cambridge, MA
02139-3573

Work  617-258-3420
Cell  508-930-3461
www.draper.com<http://www.draper.com>



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Jingqi Li
Sent: Tuesday, June 13, 2017 9:30 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Please recommend a RF sputter system

Dear All,
We want to order a RF sputter system with at least 4 target sources. Could you please recommend one company to me according to your experience? The system should have less cross contamination and reliable mechanical operation (for example, sample transportation between chamber and load lock, our current system has a lot of problem with this).

Thanks & Regards
Jingqi Li
Nanofabrication Core Lab
King Abdullah University of Science and Technology
Thuwal 23955-6900
Saudi Arabia

Tel: +966 012 808 4589

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