[labnetwork] Erbium sputtering

[Chito Kendrick]

I have a user that is wanting to sputter Erbium. From a quick search 
Erbium is pretty reactive with air and both our sputters are not load 
locked and so the target would be coming up to atmosphere when 
un/loading. Has anyone had experience with sputtering of Erbium and if 
there will be issues? I have not talked to the user about what they want 
to do exactly, but it sounds like they want to produce Er nanoparticles 
in a silicon thin film.

Regards,

Chito Kendrick


-- 
Chito Kendrick Ph.D. <https://sites.google.com/site/chitokendrickphd/>

Managing Director of the Microfabrication Facility
Research Assistant Professor
Electrical and Computer Engineering
Michigan Technological University
Room 436 M&M Building
1400 Townsend Dr.
Houghton, Michigan 49931-1295

814-308-4255
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