[labnetwork] CoFeB sputtering

[Luciani, Vincent (Fed)]

Hello Nava,

I talked to our PVD expert, Dr. Gerard Henein and he wrote:

Yes we do have this target and several users have used it over the years.
No safety or contamination concern. It is a very strong ferromagnet so the target needs to be thin (ours is 1/8”) and you need very strong magnets in the sputter gun.
The material is also brittle and will develop a crack in the long run. Gradual power up and power down is best. Binding it to a copper backing plate will also help.

Feel free to contact Gerard directly if you like.  He is a wealth of knowledge.

Best,

Vince


Vincent K. Luciani
NanoFab Manager
Center for Nanoscale Science and Technology<http://www.cnst.nist.gov/>
National Institute of Standards and Technology
100 Bureau Drive, MS 6201
Gaithersburg, MD 20899-6200 USA
+1-301-975-2886






From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel-Sternberg
Sent: Tuesday, March 28, 2017 8:37 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] CoFeB sputtering

Good morning,

Does anyone have experience with sputtering CoFeB? Are there any issues to worry about? (tool contamination, process sensitivities, etc.)

Thanks,
Nava


Nava Ariel-Sternberg, Ph.D.
Director of CNI Shared Facilities
Columbia University
530 w120th st., NY 10027
Room 1015/MC 8903
Office: 212-854-9927
Cell: 201-562-7600

​

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