[labnetwork] STS system and problem statement for lab network

[Mark Weiler]

Hi Ian,

Please reach out to Jeff Hawks…  He is helping us to overcome some issues with ours.  He also upgrades STS systems.


Jeff Hawks
Hawks Technical Services LLC.
2715 Swamp Creek Rd.
Green Lane, PA. 18054
C 215-872-0944


Best regards,

Mark


________________________________________________________________

Mark Weiler
Fab Equipment Manager
CMU Nanofabrication Facility
Dept. of Electrical & Computer Engineering
5000 Forbes Avenue
Pittsburgh, PA 15213
P:  412-268-2471
F:  412-268-4323
www.ece.cmu.edu<http://www.ece.cmu.edu>


[cid:2D2E01E3-CEC1-4F48-A845-224D8D7CED12 at wv.cc.cmu.edu] <https://www.linkedin.com/in/marksbasics>
<https://www.linkedin.com/in/marksbasics>
On Oct 16, 2017, at 12:10 PM, Ian Harvey <IRHarvey at eng.utah.edu<mailto:IRHarvey at eng.utah.edu>> wrote:

Dear Labnetwork colleagues,

Every so often we run into a tool problem beyond our ability to repair.  In this case, we are wondering if anyone can either recommend a tool repair technician for a 2001-vintage STS ASPECT DRIE or if you have an experienced technician we could pay to come here and help us bring it back online.

Also, this tool has the anti-footing feature, and we are wondering who in the network has something similar interested in running a (recharge) process for our PI?

Thanks,

—Ian

Begin forwarded message:

From: Steve Pritchett <spritchett at eng.utah.edu<mailto:spritchett at eng.utah.edu>>
Subject: STS system and problem statement for lab network
Date: October 16, 2017 9:57:40 AM MDT
To: Ian Harvey <IRHarvey at eng.utah.edu<mailto:IRHarvey at eng.utah.edu>>
Cc: Charles Fisher <charlesjfisher at gmail.com<mailto:charlesjfisher at gmail.com>>

Hi Ian,
STS ASPECT ICP etcher (DRIE)
Advanced Silicon Etch Cluster Tool (ASPECT), Year of Manufacture: 2001, Serial Number: C102
Configured with single chamber and Cluster System with Cassette Automation, Brooks VacuTran 5 robot and Vacuum Cassette Elevator VCE 6
With SOI process kit upgrade.

Problems:

  *   Interlock LED on ICP electronics rack showing "clamp on”. ElectroGrip DR4 ESC control is in clamp off state with 0 volts output to ESC. Results in "clamp fault” just before He LUR test at start of process.
  *   When the dealer PC is reset, the robot is homed. But theta and Z positions appear offset from true home. After a power off/on cycle of the robot and home command from hand control, the robot homes to the true home positions.
     *   Operator station commands to transfer a wafer from cassette to ICP fails, halting the robot endeffector within the VCE and dealer PC shows communication error from VT5.
  *   Intermittently the VCE stops responding and does not actually re-home or map cassette. An error is not reported but the load station controls are inactive on the operator station window.

Thanks,
Steve





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