[labnetwork] dealing with photoresist fumes

[N. Shane Patrick]

Hello Nathaniel,

All chemical use in our facility, including photoresist, is restricted to fume hoods which are compliant with the established safe operating conditions per our campus Environment, Health and Safety (EH&S) department. Whenever it’s a question of safety, I recommend working with the associated department for your location. SFU appears to have an EH&S office who should be able to assist with this: http://www.sfu.ca/srs/ehs.html <http://www.sfu.ca/srs/ehs.html>

N. Shane Patrick
Research Engineer, Washington Nanofabrication Facility (WNF)
National Nanotechnology Coordinated Infrastructure (NNCI)
University of Washington
Fluke Hall 132, Box 352143
(206) 221-1045
patricns at uw.edu <mailto:patricns at uw.edu>
http://www.wnf.washington.edu/ <http://www.wnf.washington.edu/>

> On Apr 16, 2018, at 9:31 AM, Nathanael Sieb <sieb at 4dlabs.ca> wrote:
> 
> Hi all,
> 
> I'm curious how the different labs out there deal with photoresist safety.  I know that the fumes can be toxic, but it is difficult to deal with completely.  We have all of our spin coaters under a canopy exhaust that captures a lot of the fumes, but you can still smell it.  Do others put the coaters in a fume hood?  Perhaps use respirators?  Or is it not that big of a concern if you capture most of it?
> 
> Thanks,
> 
> Nathanael
> 
> Nathanael Sieb
> Director of Operations and Administration
> 4D LABS, Simon Fraser University    8888 University Drive, Burnaby, B.C. V5A 1S6
> E sieb at 4dlabs.ca <mailto:sieb at 4dlabs.ca> T 778.782.8084 F 778.782.3765 W www.4dlabs.ca <http://www.4dlabs.ca/>
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