[labnetwork] dealing with photoresist fumes

[Michael Khbeis]

Nathanael, 

For our manual spin stations, we keep spinners mounted or embedded in a fume hood below deck level. Bowls are exhausted through plenum. Top side of the hood has FFU to help minimize particulate and the hood stays slightly negative pressure to the room. We will always have such workstations to remain flexible on the multitude of resists being processed, but are working on bringing up some coat tracks to address the most common resists. 

Best, 

Dr. Michael Khbeis
Director, Washington Nanofabrication Facility (WNF) 
National Nanotechnology Coordinated Infrastructure (NNCI)
University of Washington
Fluke Hall, Box 352143
(O) 206.543.5101
(F) 206.221.1681
(C) 443.254.5192
khbeis at uw.edu
www.wnf.washington.edu/

> On Apr 16, 2018, at 9:31 AM, Nathanael Sieb <sieb at 4dlabs.ca> wrote:
> 
> Hi all,
> 
> I'm curious how the different labs out there deal with photoresist safety.  I know that the fumes can be toxic, but it is difficult to deal with completely.  We have all of our spin coaters under a canopy exhaust that captures a lot of the fumes, but you can still smell it.  Do others put the coaters in a fume hood?  Perhaps use respirators?  Or is it not that big of a concern if you capture most of it?
> 
> Thanks,
> 
> Nathanael
> 
> Nathanael Sieb
> Director of Operations and Administration
> 4D LABS, Simon Fraser University    8888 University Drive, Burnaby, B.C. V5A 1S6
> E sieb at 4dlabs.ca T 778.782.8084 F 778.782.3765 W www.4dlabs.ca
>        
> 
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork