[labnetwork] STS Multiplex DRIE

[Mark Weiler]

Jeff Hawks has been very helpful for us here at CMU.  He provides PLC-based upgrades to STS/STPS systems, and has upgraded our AOE system (previously on a cluster tool) to have its own load lock with new MMI.

See John’s email for contact info…

Mark


________________________________________________________________

Mark Weiler
Equipment & Facilites Manager
CMU Nanofabrication Facility
Dept. of Electrical & Computer Engineering
5000 Forbes Avenue
Pittsburgh, PA 15213
P:  412-268-2471
F:  412-268-4323
www.ece.cmu.edu<http://www.ece.cmu.edu>


[cid:2D2E01E3-CEC1-4F48-A845-224D8D7CED12 at wv.cc.cmu.edu] <https://www.linkedin.com/in/marksbasics>
<https://www.linkedin.com/in/marksbasics>

On Jul 31, 2018, at 9:27 PM, Nibarger, John (Fed) <john.nibarger at nist.gov<mailto:john.nibarger at nist.gov>> wrote:

We’ve had good luck with Jeff Hawks for our STS ASE DRIE.

Jeff Hawks
Hawks Technical Services LLC.
2715 Swamp Creek Rd.
Green Lane, PA. 18054
C 215-872-0944

Cheers,
John

John P. Nibarger, Ph.D.
Manager, Boulder Micro-fabrication Facility
Microfabrication Group Leader (687.10)
National Institute of Standards and Technology
325 Broadway<https://na01.safelinks.protection.outlook.com/?url=https%3A%2F%2Fmaps.google.com%2F%3Fq%3D325%2BBroadway%26entry%3Dgmail%26source%3Dg&data=02%7C01%7Cjohn.nibarger%40nist.gov%7C7a4a44cd6aa74b8b87dd08d5295f3175%7C2ab5d82fd8fa4797a93e054655c61dec%7C1%7C0%7C636460411211981162&sdata=QzQI8AT3AFr2jBLhHQHeeTUvIHeXtnrZJ83CM453uEA%3D&reserved=0>, MS 817.03
Boulder, CO  80305
303-497-4575<tel:(303)%20497-4575> (phone)
303-497-3042<tel:(303)%20497-3042> (fax)
john.nibarger at nist.gov<mailto:john.nibarger at nist.gov>


From: <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> on behalf of "proma016 at fiu.edu<mailto:proma016 at fiu.edu>" <proma016 at fiu.edu<mailto:proma016 at fiu.edu>>
Date: Friday, July 27, 2018 at 6:59 AM
To: "labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>" <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: [labnetwork] STS Multiplex DRIE

Greetings labnetwork

Can someone recommend an FSE for starup and service of an early model STS DRIE bosch process Si etcher?
Sent from my iPhone

On Jul 26, 2018, at 10:06 PM, Paolini, Steven <spaolini at cns.fas.harvard.edu<mailto:spaolini at cns.fas.harvard.edu>> wrote:
Both are great systems. We like our Oxford Cobra ICP so much that we bought its sister system in ICPCVD. We have a Plasmatherm Versaline system that runs flawlessly as well. In my 35 years of experience, these systems Represent the best in class for university work.
I can’t think of any cons with either platform.

Steve Paolini
Equipment Dood
Harvard University Center for Nanoscale Systems.

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu<mailto:spaolini at cns.fas.harvard.edu>
www.cns.fas.harvard.edu<https://na01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.cns.fas.harvard.edu&data=02%7C01%7Cjohn.nibarger%40nist.gov%7Cad565b164c934851ffba08d5f3c0c0f0%7C2ab5d82fd8fa4797a93e054655c61dec%7C1%7C0%7C636682931559003003&sdata=o%2F2Mt1rghHI5FfJvigHLup8LUq%2BZJWWrLCCVD0xmDMQ%3D&reserved=0>

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chen, Jun
Sent: Thursday, July 26, 2018 12:51 PM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Experience on ICP-RIE

Dear Colleagues,
We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and  Plasma-Therm Apex SLR ICP.
Does anyone have experience on these systems? What’s the pros and cons?  I would greatly appreciate for your feedback!

best,

Jun Chen, Ph.D.
Nanofabrication scientist,
Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh
3700 O'Hara Street, Pittsburgh, PA 15261
T: 412.383.3282
http://www.nano.pitt.edu/<https://na01.safelinks.protection.outlook.com/?url=https%3A%2F%2Furldefense.proofpoint.com%2Fv2%2Furl%3Fu%3Dhttp-3A__www.nano.pitt.edu_%26d%3DDwMF-g%26c%3DWO-RGvefibhHBZq3fL85hQ%26r%3D-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks%26m%3DrcBR73_HmJ1YnlhPiz3lpHV6zNZE8DiWyvDcNaBXmLA%26s%3D7UtitOhQns4HNOjOgtfXCIyh2ehYIdyHyMWZTAwp9lM%26e%3D&data=02%7C01%7Cjohn.nibarger%40nist.gov%7Cad565b164c934851ffba08d5f3c0c0f0%7C2ab5d82fd8fa4797a93e054655c61dec%7C1%7C0%7C636682931559003003&sdata=9%2FzdhXW%2BlWh4O1Wbb728JwyHJxj6pQeaPj0C020YuqY%3D&reserved=0>


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