[labnetwork] PlasmaTherm 720 and a selective SiO2 etch ?

[James C. Sturm]

Hi, we have a PlasmaTherm 720 RIE etcher plumbed with CF4 and H2.

Does anyone have a recipe for selective etching of thermal SiO2 (stopping on silicon with selectivity > 10).

Right now the chamber has an Al feature plate (outside of the wafer) which we'd prefer to leave in if possible.

Thanks, Jim Sturm and Eric Mills, Princeton University
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20180814/6542af7b/attachment.html>