[labnetwork] Equipment Support for Strasbaugh CMP?

[Jim Fraser]

Dear Colleagues,

One of my researchers is trying to resurrect a Strasbaugh 6EC CMP system. He is having a problem with the wafer chuck not rotating. He said the company has been bought out and he can't find anyone who supports the system. Does anyone have a contact that has been able to help with these older systems?

Thanks for your help,

James R Fraser
IML Manager
460-L EB
Brigham Young University
801-422-4344

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