[labnetwork] Equipment Support for Strasbaugh CMP?

[Christophe Clément]

Hi Jim, we have the same tool here at Poly, we bought it from Axus
Technology, they can offer support if you need.

 

You can contact Tim St Marie:

Tim St. Marie 
Customer Support Manager 
Axus Technology 
 <http://www.axustech.com/> WWW.axustech.com 
7001 W. Erie Street, Suite 1 
Chandler, AZ 85226 
Main Number:    480-705-8000 
Direct Line:        480-240-5548 
Cell Phone:         602-300-7901 
Office Fax:         480-705-8011 

 

Regards, 

 

Christophe Clément

Technicien laboratoire

Laboratoire de microfabrication (LMF)

Groupe des Couches Minces (GCM) www.gcmlab.ca <http://www.gcmlab.ca> 

Ecole Polytechnique de Montréal  <http://www.polymtl.ca/> www.polymtl.ca

Département de génie physique 

* 2900 Boulevard Edouard Monpetit

Pavillon JAB
Campus de l'Université de Montréal
Montréal (Québec) H3T 1J4


8  <mailto:christophe.clement at polymtl.ca> christophe.clement at polymtl.ca

( 514 340 4711

Fax : 514 340 4711 # 2417 

 

De : Jim Fraser [mailto:jfraser96 at byu.edu] 
Envoyé : 11 décembre 2018 10:58
À : labnetwork at mtl.mit.edu
Objet : [labnetwork] Equipment Support for Strasbaugh CMP?

 

Dear Colleagues,

 

One of my researchers is trying to resurrect a Strasbaugh 6EC CMP system. He
is having a problem with the wafer chuck not rotating. He said the company
has been bought out and he can’t find anyone who supports the system. Does
anyone have a contact that has been able to help with these older systems?

 

Thanks for your help,

 

James R Fraser

IML Manager

460-L EB

Brigham Young University

801-422-4344

 

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